1x Multi-Transmission Test Masks

Setting up your new lithography process or trouble-shooting/optimizing existing processes is time consuming and expensive, especially when using 1x exposure systems. Eliminate frustration, save time, and reduce costs with these handy multi-transmission test reticles designed to allow for quick determination of optimum exposure dose using a single wafer or substrate. 

 

Typical Applications

  • Find optimum dose and exposure latitude with a single 1x exposure                          
  • Standard design may be customized
  • 5" and 7" glass are standard; other sizes available via custom order
  • Saves hours of set up time and spend on materials

 

Design Features

  • Typical transmission values from 30 to 70% plus 100%
  • Actual spectrophotometer transmission measurements provided with each reticle.
  • Transmission film is resistant to typical solvent cleans
  • Open windows provided for each transmission region allow for ellipsometer use  
  • Standard resolution patterns included
  • Production proven in over 200 fabs

 

 

 

 

 

 

 

Contact your Integrated Micro Materials representative for more information or a quotation for 1x test reticles.

I would like more information or a quotation for Integrated Micro Materials' test masks.