MicroPrimeTM HP Primer

Silicon and other oxide forming substrate materials require priming with HMDS (hexamethyldisilazane) in order to prevent photoresist delamination during develop and/or wet etch. MicroPrime HP Primer is an ultra-high purity HMDS based adhesion promoter available in 1 Liter bottles, in stock for immediate shipping.

 

  *Typical for high purity packages

 

APPLICATION

MicroPrime HP Primer may be applied via vapor, spray, or spin coating (spray or spin-on application requires a post bake of 100-150°C). Please refer to the MSDS for proper handling and disposal of MicroPrime HP Primer.

Note: HMDS degrades quickly upon exposure to air (humidity). Keep containers tightly sealed and take precautions to minimize exposure to the environment.

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Click here to learn more about processing with HMDS