High Purity Semiconductor Grade HMDS

Silicon and other oxide forming substrate materials require priming with HMDS (hexamethyldisilazane) in order to prevent photoresist delamination during develop and/or wet etch. Our primer is an ultra-high purity HMDS based adhesion promoter available in quart bottles, gallon bottles, and 200L drums. In stock for immediate shipping.


Apply via vapor, spray, or spin coating (spray or spin-on application requires a post bake of 100-150°C). Please refer to the SDS for proper handling and disposal of HMDS Primer.

Note: HMDS degrades quickly upon exposure to air (humidity). Keep containers tightly sealed and take precautions to minimize exposure to the environment.