Setting up your new lithography process or trouble-shooting/optimizing existing processes is time consuming and expensive, especially when using 1x exposure systems. Eliminate frustration, save time, and reduce costs with these handy resolution test reticles produced with a wide variety of useful imaging features that minimize test iterations and streamline the optimization process.
Typical Applications
Quickly determine resolution limits for any feature type (to 1.0μm)
Find best focus
Determine print bias for any feature type
Optimize photoresist adhesion
Assess step coverage performance
Design Features
Long line/space features
Contact hole strings
All features in both positive and negative tone
Cleavable line and contact arrays
Short lines from 1.0 to 5.0μm for easy linearity measurements
Cells are individually numbered for traceability
Clear field design facilitates low angle SEM analysis
Available in all common glass sizes
Contact your Integrated Micro Materials representative for more information or a quotation for 1x test reticles.